Forming a beam of ions extracted from glow-discharge plasma

被引：3
|
作者：
Gavrilov, NV
Emlin, DR
机构：
[1] Russian Acad Sci, Inst Gen Phys, Moscow 117942, Russia
[2] Russian Acad Sci, Ural Div, Inst Electrophys, Yekaterinburg 620049, Russia
来源：
TECHNICAL PHYSICS | 2000年 / 45卷 / 05期
关键词：
Experimental Study; Computer Simulation; Glow Discharge; Electrode System; Screen Electrode;
D O I：
10.1134/1.1259683
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
In plasma-emitting structures based on glow-discharge, the potential difference between the ion-emitting plasma and the screening electrode of an ion-optic system depends on particular features of the electrode system of glow discharge and can vary in a range 0-1 kV. Results are presented of an experimental study and computer simulation of the formation of ion beams with ion energy 0-1 keV and current density 1-10 mA/cm(2) in ion sources based on such structures. (C) 2000 MAIK "Nauka/Interperiodica".
引用
收藏
页码：597 / 604
页数：8
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