Microstructure changes in nanoparticulate gold films under different thermal atmospheres and the effects on bondability

被引:7
|
作者
Jang, Seonhee [1 ]
Joung, Jaewoo [1 ]
Oh, Yongsoo [1 ]
机构
[1] Samsung Electromech Co Ltd, Elect Mat & Device EMD Ctr, Cent R&D Inst, Suwon 443743, Gyunggi Do, South Korea
关键词
Sintering; Gold; Nanoparticle; Coalescence; Grain growth; COALESCENCE; CU;
D O I
10.1016/j.actamat.2009.07.059
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Sintering in a furnace under different thermal atmospheres of air, nitrogen (N-2) or N-2 bubbled through formic acid (FA/N-2) was carried out for a spin-coated gold nanoparticle (NP) ink. Temperatures of 200, 250 and 290 degrees C were applied for each atmosphere. The size of the NPs was measured by transmission electron microscopy and the decomposition temperatures of the solvent and the organic capping molecules of the ink were determined by thermo-gravimetric analysis. The changes in the microstructure of Au NP films after sintering were studied using the field emission scanning electron microscopy, X-ray diffractometry, atomic force microscopy and focused ion beam analysis. Organic residues remaining on the film were detected by Fourier transform infrared spectroscopy and sheet resistance was measured using a four point probe for the calculation of resistivity. Wire bonding tests on the Au film were performed for bondability. The Au NP films sintered under air showed neck growth as temperature increased, while the films sintered under N-2 showed grain growth, except for the film sintered at 290 degrees C. Coalescence and grain growth as well as porosity were observed in the film sintered under FA/N-2. The infrared absorption peaks of stretch and deformation were found as organic residues, with C-O stretch peak only being detected in the film sintered under FA/N-2. All of the samples represented a preferred An (111) orientation. The film sintered under N-2 showed good quality compared with those sintered under air or FA/N-2 and the resistivity was about twice the bulk value. Wire bonding tests were successful in all the films sintered under air, N-2 or FA/N-2 atmospheres. (C) 2009 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.
引用
收藏
页码:5613 / 5620
页数:8
相关论文
共 50 条
  • [41] MICROSTRUCTURE AND THERMAL-CONDUCTIVITY OF ALN(Y2O3) CERAMICS SINTERED IN DIFFERENT ATMOSPHERES
    BUHR, H
    MULLER, G
    JOURNAL OF THE EUROPEAN CERAMIC SOCIETY, 1993, 12 (04) : 271 - 277
  • [42] TEXTURE AND SENSORY CHANGES OF A FRESH EWE'S CHEESE PACKED UNDER DIFFERENT MODIFIED ATMOSPHERES
    Del Caro, A.
    Sanguinetti, A. M.
    Madrau, M.
    Murittu, G.
    Santoru, A.
    Piga, A.
    ITALIAN JOURNAL OF FOOD SCIENCE, 2009, 21 : 225 - 227
  • [43] The electrical properties of CdTe films of different preparation conditions in correlation with microstructure changes
    Ashour, A
    ElKadry, N
    Ebid, MR
    Farghal, M
    Ramadan, AA
    THIN SOLID FILMS, 1996, 279 (1-2) : 242 - 247
  • [44] Evaluation of sensory and biochemical changes in freshwater catfish stored under vacuum and different modified atmospheres
    Shariat, Maryam
    Raftari, Mohammad
    Abu Bakar, Fatimah
    ANALYTICAL METHODS, 2013, 5 (01) : 231 - 238
  • [45] Thermal Treatment Effects on Microstructure and Mechanical Properties of TiAlN Thin Films
    A.E. Santana
    A. Karimi
    V.H. Derflinger
    A. Schütze
    Tribology Letters, 2004, 17 : 689 - 696
  • [46] Thermal treatment effects on microstructure and mechanical properties of TiAlN thin films
    Santana, AE
    Karimi, A
    Derflinger, VH
    Schütze, A
    TRIBOLOGY LETTERS, 2004, 17 (04) : 689 - 696
  • [47] Selective Hydrogenation of Acetylene Over Gold Nanoparticles Supported on CeO2 Pretreated Under Different Atmospheres
    Shuang Peng
    Xun Sun
    Libo Sun
    Miao Zhang
    Yuhua Zheng
    Huijuan Su
    Caixia Qi
    Catalysis Letters, 2019, 149 : 465 - 472
  • [48] Selective Hydrogenation of Acetylene Over Gold Nanoparticles Supported on CeO2 Pretreated Under Different Atmospheres
    Peng, Shuang
    Sun, Xun
    Sun, Libo
    Zhang, Miao
    Zheng, Yuhua
    Su, Huijuan
    Qi, Caixia
    CATALYSIS LETTERS, 2019, 149 (02) : 465 - 472
  • [49] Photoinduced surface roughness variation in polycrystalline TiO2 thin films under different atmospheres
    Arimitsu, Naoki
    Nakajima, Akira
    Katsumata, Ken-Ichi
    Shiota, Tadashi
    Watanabe, Toshiya
    Yoshida, Naoya
    Karneshima, Yoshikazu
    Okada, Kiyoshi
    JOURNAL OF PHOTOCHEMISTRY AND PHOTOBIOLOGY A-CHEMISTRY, 2007, 190 (01) : 53 - 57
  • [50] Synthesis and optical properties of Cu2SnZnS4 films under different sulfur atmospheres
    Xian-Cong He
    Hong-Lie Shen
    Jin-Hong Pi
    Chuan-Xiang Zhang
    Yu Hao
    Xiao-Bo Shi
    Rare Metals, 2018, 37 (09) : 808 - 814