Comparison between experiment and simulation for argon inductively coupled plasma

In order to include the nonlocal characteristics of electrons and investigate the inductively coupled plasma (ICP) resources more completely, we have developed a hybrid Monte Carlo (MC)/fluid hybrid model and calculated the axial and radial distributions of electron density, electron temperature., plasma potential, and electron energy distribution functions (EEDFs) of Ar discharge in a planar ICP. Furthermore. to make the model more practical, we still incorporate the effects of metastable atoms, whose sets of rate coefficients and density are, respectively, calculated through the electron MC part and fluid module. Besides, the corresponding Langmuir probe measurements are used to compare these data to validate the simulated results. Under all the selected discharge powers and pressures, the theoretically simulated and experimentally measured quantity profiles agree reasonably with each other, embodied in the generally identical magnitude ranges and spatial distributions. Furthermore, the interpretations about their detailed differences are given, which are based on the designs of both experimental schematic and model configuration. The analysis implements that the inclusions of electron-electron collision and a neutral density distribution into the hybrid model are likely to improve the comparison between the model predictions and experiment diagnostics. Furthermore, the evolution of plasma parameters and EEDFs with discharge conditions is discussed. (C) 2009 American Institute of Physics. [doi:10.1063/1.3261836]