Reflection characterization of anisotropic ultrathin dielectric films on absorbing isotropic substrates

被引:3
|
作者
Adamson, Peep [1 ]
机构
[1] Univ Tartu, Inst Phys, EE-51014 Tartu, Estonia
关键词
Semi-empirical models and model calculations; Insulating films; Ellipsometry; SCANNING-ANGLE REFLECTOMETRY; GENERALIZED ELLIPSOMETRY; OPTICAL-PROPERTIES; THIN-FILMS; DIFFERENTIAL REFLECTIVITY; LATEX-PARTICLES; SURFACE-STATES; BREWSTER-ANGLE; SPECTROSCOPY; LIGHT;
D O I
10.1016/j.susc.2009.09.007
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
The reflection of linearly polarized light from an ultrathin anisotropic dielectric film on isotropic absorbing substrate is investigated analytically in the long-wavelength limit. All analytical results are correlated with the numerical solution of the anisotropic reflection problem on the basis of rigorous electromagnetic theory. Simple analytical approach developed in this work not only gives a physical insight into the reflection problem but also provides a way of estimating the necessary experimental accuracy for optical diagnostics by reflection characteristics. It is shown that obtained expressions are of immediate interest for determining the parameters of anisotropic surface layers. Innovative possibilities for optical diagnostics of anisotropic properties of ultrathin dielectric layers upon absorbing materials are discussed. (C) 2009 Elsevier B.V. All rights reserved.
引用
收藏
页码:3227 / 3233
页数:7
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