The preparation and investigation of all thin film electrochromic devices based on reactively sputtered MoO3 thin films

被引：28
|
作者：
Han, Qiaonan [1 ]
Wang, Rui [1 ]
Zhu, Hongbing [1 ]
Wan, Meixiu [1 ]
Mai, Yaohua [1 ]
机构：
[1] Jinan Univ, Coll Informat Sci & Technol, Inst New Energy Technol, Guangzhou 510632, Peoples R China
来源：
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING | 2021年 / 126卷
基金：
中国国家自然科学基金;
关键词：
MoO3 thin film; Reactive magnetron sputtering; Electrochromic device; MOLYBDENUM OXIDE; SOLAR-CELLS; DEPOSITION; PHOTOCHROMISM; MODEL; ABSORPTION; DEPENDENCE; TRANSPORT; ELECTRON; LAYER;
D O I：
10.1016/j.mssp.2021.105686
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Reactively sputtered molybdenum trioxide (MoO3) thin films were systematically investigated and employed as cathodic electrochromic layers in all thin film electrochromic devices (ATF-ECDs). The gas loop controller was employed for adjustment of inputted oxygen gas flux by monitoring the target voltage during reactive sputtering. The working pressure played a great role on the deposition rate, crystallite size, optical properties and the electrochromic properties of MoO3 and the applied ATF-ECDs (soda lime glass (SLG)/ITO/NiOX/Ta2O5/MoO3/ITO). A 4 Pa MoO3 based ATF-ECD achieved a high optical modulation (transmission @ 600 nm) of similar to 50% and a high coloration efficiency of 149.4 cm(2)/C.
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页数：10
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