Effect of Thermal Annealing on the Optical Properties of In-Si-O/Ag/In-Si-O Multilayer

被引：0

作者：

Yu, Jiao Long ^{[1
]}

Lee, Sang Yeol ^{[1
]}

机构：

[1] Cheongju Univ, Dept Semicond Engn, Cheongju Chungbuk 360764, South Korea

来源：

JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY | 2017年 / 17卷 / 05期

基金：

新加坡国家研究基金会;

关键词：

TCO; Low-e Coating; OMO; Transmittance Curve; Drude Model; PLASMONIC MATERIALS; SILVER;

D O I：

10.1166/jnn.2017.14054

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Low emissive transparent multilayers were fabricated with amorphous Si-doped indium oxide (ISO) transparent semiconductor and metallic Ag by Ag thickness. High transmittance in the visible range of the as-deposit ISO/Ag/ISO multilayer was verified in the experiment results, and the optical properties of an oxide-metal-oxide tri-layer were sensitive to the silver layer's thickness. After annealing, the transmittance in the visible range increased by over 10%, and low emissivity for infrared was maintained.

引用

页码：3477 / 3479

页数：3

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