Effect of Thermal Annealing on the Optical Properties of In-Si-O/Ag/In-Si-O Multilayer

被引：0
|
作者：
Yu, Jiao Long [1 ]
Lee, Sang Yeol [1 ]
机构：
[1] Cheongju Univ, Dept Semicond Engn, Cheongju Chungbuk 360764, South Korea
来源：
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY | 2017年 / 17卷 / 05期
基金：
新加坡国家研究基金会;
关键词：
TCO; Low-e Coating; OMO; Transmittance Curve; Drude Model; PLASMONIC MATERIALS; SILVER;
D O I：
10.1166/jnn.2017.14054
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
Low emissive transparent multilayers were fabricated with amorphous Si-doped indium oxide (ISO) transparent semiconductor and metallic Ag by Ag thickness. High transmittance in the visible range of the as-deposit ISO/Ag/ISO multilayer was verified in the experiment results, and the optical properties of an oxide-metal-oxide tri-layer were sensitive to the silver layer's thickness. After annealing, the transmittance in the visible range increased by over 10%, and low emissivity for infrared was maintained.
引用
收藏
页码：3477 / 3479
页数：3
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