High-Frequency (>50 MHz) Medical Ultrasound Linear Arrays Fabricated From Micromachined Bulk PZT Materials

被引：20
|
作者：
Liu, Changgeng [1 ]
Zhou, Qifa [2 ]
Djuth, Frank T. [1 ]
Shung, K. Kirk [2 ]
机构：
[1] Geospace Res Inc, El Segundo, CA USA
[2] Univ So Calif, Dept Biomed Engn, Los Angeles, CA 90089 USA
来源：
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL | 2012年 / 59卷 / 02期
基金：
美国国家卫生研究院;
关键词：
Transducers; Etching; Ultrasonic imaging; Materials; Plasmas; Acoustics; Frequency measurement; TRANSDUCERS; FILMS;
D O I：
10.1109/TUFFC.2012.2193
中图分类号：
O42 [声学];
学科分类号：
070206 ; 082403 ;
摘要：
This paper describes the development and characterization of a high-frequency (65-MHz) ultrasound transducer linear array. The array was built from bulk PZT which was etched using an optimized chlorine-based plasma dry-etching process. The median etch rate of 8 mu m/h yielded a good profile (wall) angle (>83 degrees) and a reasonable processing time for etch depths up to 40 mu m (which corresponds to a 50-MHz transducer). A backing layer with an acoustic impedance of 6 MRayl and a front-end polymer matching layer yielded a transducer bandwidth of 40%. The major parameters of the transducer have been characterized. The two-way insertion loss and crosstalk between adjacent channels at the center frequency are 26.5 and -25 dB, respectively.
引用
收藏
页码：315 / 318
页数：4
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