New Fabrication of High-Frequency (100-MHz) Ultrasound PZT Film Kerfless Linear Array

被引：26

作者：

Zhu, Benpeng ^{[1
,2
,3
,4
]}

Chan, Ngai Yui ^{[3
,4
]}

Dai, Jiyan ^{[3
,4
]}

Shung, K. Kirk ^{[5
,6
]}

Takeuchi, Shinichi ^{[7
]}

Zhou, Qifa ^{[5
,6
]}

机构：

[1] Huazhong Univ Sci & Technol, Sch Opt & Elect Informat, Wuhan 430074, Peoples R China

[2] Minist Educ, Moscow, Russia

[3] Hong Kong Polytech Univ, Dept Appl Phys, Hong Kong, Hong Kong, Peoples R China

[4] Hong Kong Polytech Univ, Mat Res Ctr, Hong Kong, Hong Kong, Peoples R China

[5] Univ So Calif, Natl Inst Hlth, Transducer Resource Ctr, Los Angeles, CA USA

[6] Univ So Calif, Dept Biomed Engn, Los Angeles, CA 90089 USA

[7] Toin Univ Yokohama, Grad Sch Engn, Med Engn Course, Yokohama, Kanagawa, Japan

来源：

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL | 2013年 / 60卷 / 04期

基金：

中国国家自然科学基金; 美国国家卫生研究院;

关键词：

THICK-FILM; MHZ; TRANSDUCER;

D O I：

10.1109/TUFFC.2013.2635

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

The paper describes the design, fabrication, and measurements of a high-frequency ultrasound kerfless linear array prepared from hydrothermal lead zirconate titanate (PZT) thick film. The 15-mu m hydrothermal PZT thick film with an area of 1 x 1 cm, obtained through a self-separation process from Ti substrate, was used to fabricate a 32-element 100-MHz kerfless linear array with photolithography. The bandwidth at -6 dB without matching layer, insertion loss around center frequency, and crosstalk between adjacent elements were measured to be 39%, -30 dB, and -15 dB, respectively.

引用

页码：854 / 857

页数：4

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