Fabrication and properties of CoPt patterned media with perpendicular magnetic anisotropy

被引：21
|
作者：
Aoyama, T [1 ]
Uchiyama, K [1 ]
Kagotani, T [1 ]
Hattori, K [1 ]
Wada, Y [1 ]
Okawa, S [1 ]
Hatate, H [1 ]
Nishio, H [1 ]
Sato, I [1 ]
机构：
[1] TDK Corp, Data Storage Tecnol Ctr, Nagano 3850009, Japan
来源：
IEEE TRANSACTIONS ON MAGNETICS | 2001年 / 37卷 / 04期
关键词：
patterned media; perpendicular media; electron beam lithography; reactive ion etching; magnetic force microscopy; thermal stability;
D O I：
10.1109/20.950926
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Magnetic dot-arrays with dot diameters of 80 to 1000 mn have been fabricated by patterning CoPt alloy continuous films. All of the fabricated dots had their magnetic easy axes perpendicular to the plane. From MFM observations, dots with diameters of 160 nm and larger had multi domain structures. For the dot-array with 80 nm dot diameter, every dot was observed as a single domain. CoPt dot-array with 80 mn dot diameter showed excellent thermal stability in comparison with conventional longitudinal media and perpendicular media.
引用
收藏
页码：1646 / 1648
页数：3
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