Experimental and numerical study of cw green laser crystallization of a-Si:H thin films

被引:0
|
作者
Garcia, O. [1 ]
Munoz-Martin, D. [1 ]
Garcia-Ballesteros, J. J. [1 ]
Chen, Y. [1 ]
Morales, M. [1 ]
Carabe, J. [2 ]
Gandia, J. J. [2 ]
Molpeceres, C. [1 ]
机构
[1] Univ Politecn Madrid, Ctr Laser UPM, Madrid 28031, Spain
[2] CIEMAT, E-28040 Madrid, Spain
关键词
SILICON;
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
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页数:1
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