Objects identification on the color layout images of the integrated circuit layers

被引：5
|
作者：
Doudkin, Alexander [1 ]
Inyutin, Alexander [1 ]
Vatkin, Maksim [1 ]
机构：
[1] Natl Acad Sci Belarus, United Inst Informat Problem, Minsk 220012, BELARUS
来源：
2005 IEEE INTELLIGENT DATA ACQUISITION AND ADVANCED COMPUTING SYSTEMS: TECHNOLOGY AND APPLICATIONS | 2005年
关键词：
objects identification; integrated circuit layer; color layout image;
D O I：
10.1109/IDAACS.2005.283057
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
An algorithm for object identitication on the color images of integrated circuit layout is proposed. The layout image is represented as set of picture areas that have slightly different conditions of photographing. The identification algorithm based on segmentation and two-steps image filtration using mathematical morphology and semantic approach. It can be applied for the tasks of integrated circuits redesign and automated visual inspection of integrated circuits and photomask production.
引用
收藏
页码：610 / 614
页数：5
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