Deposition of ZnO film by pulsed laser deposition at room temperature

被引：54
|
作者：
Nakata, Y [1 ]
Okada, T [1 ]
Maeda, M [1 ]
机构：
[1] Kyushu Univ, Grad Sch Informat Sci & Elect Engn, Higashi Ku, Fukuoka 8128581, Japan
来源：
APPLIED SURFACE SCIENCE | 2002年 / 197卷
关键词：
ZnO; pulsed laser deposition; thin film; ultraviolet photoluminescence;
D O I：
10.1016/S0169-4332(02)00426-9
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
Crystalline zinc oxide (ZnO) films were successfully deposited on sapphire and quartz glass substrates by pulsed laser deposition (PLD) at room temperature. Transmittance measurements showed that crystalline films have a clear cut off at about 350 nm. After annealing at 1000 degreesC for 10 min, ultraviolet photoluminescence at about 390 nm was observed under 308 nm excitation. (C) 2002 Elsevier Science B.V All rights reserved.
引用
收藏
页码：368 / 370
页数：3
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