Study on the silicon micro-mechanical accelerometer using an optical fiber

被引：3
|
作者：
Wang, TY [1 ]
Zhang, SR [1 ]
机构：
[1] Chanchung Univ Sci & Technol, Changchun 130022, Peoples R China
来源：
MEMS/MOEMS TECHNOLOGIES AND APPLICATIONS | 2002年 / 4928卷
关键词：
accelerometer; optical-fiber; micro-mechaning;
D O I：
10.1117/12.483183
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper, a new type of silicon micro-mechanical accelerometer using an optical fiber is presented. The mechanical element of the accelerometer is fabricated by an unconventional wet etching process of silicon, resulting in symmetrically suspended seismic masses with a high lateral sensitivity and very low transverse sensitivities. By forming a Fabry-Perot cavity between the seismic mass and the output of an optical fiber, the acceleration can be sensed by measuring the optical path change. The feasibility of the accelerometer is demonstrated.
引用
收藏
页码：264 / 266
页数：3
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