Efficient large field of view electron phase imaging using near-field electron ptychography with a diffuser

被引：14

作者：

Allars, Frederick ^{[1
]}

Lu, Peng-Han ^{[2
,3
,4
]}

Kruth, Maximilian ^{[2
,3
,4
]}

Dunin-Borkowski, Rafal E. ^{[2
,3
]}

Rodenburg, John M. ^{[1
]}

Maiden, Andrew M. ^{[1
]}

机构：

[1] Univ Sheffield, Dept Elect & Elect Engn, Sir Frederick Mappin Bldg, Sheffield S3 7HQ, S Yorkshire, England

[2] Forschungszentrum Juelich, Ernst Ruska Ctr Microscopy & Spect Electrons, D-52425 Julich, Germany

[3] Forschungszentrum Juelich, Peter Grunberg Inst, D-52425 Julich, Germany

[4] Rhein Westfal TH Aachen, D-52074 Aachen, Germany

来源：

ULTRAMICROSCOPY | 2021年 / 231卷

基金：

欧盟地平线“2020”; 英国工程与自然科学研究理事会;

关键词：

Ptychography; Phase retrieval; Electron microscopy; DIFFRACTION; MICROSCOPY; COHERENCE; RETRIEVAL;

D O I：

10.1016/j.ultramic.2021.113257

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

Most implementations of ptychography on the electron microscope operate in scanning transmission (STEM) mode, where a small focussed probe beam is rapidly scanned across the sample. In this paper we introduce a different approach based on near-field ptychography, where the focussed beam is replaced by a wide-field, structured illumination, realised through a purpose-designed etched Silicon Nitride window. We show that fields of view as large as 100 mu m2 can be imaged using the new approach, and that quantitative electron phase images can be reconstructed from as few as nine near-field diffraction pattern measurements.

引用

页数：9

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