Study of electron energy distribution functions (EEDFs) in three DC low-pressure plasma sources

被引：0

作者：

Antonova, T

Bougrov, G

Bougrova, A

Choi, WK

Goncharov, L

Jung, HJ

Koh, SK

Kondranin, S

Kralkina, E

Sitin, E

Obukhov, V

机构：

[1] RIAME MAI, Moscow 125871, Russia

[2] Plasma Tech Co Ltd, Plasma Source & Technol, Kwangju, Kyungki Do, South Korea

[3] MIREA, Moscow 117457, Russia

[4] Korea Inst Sci & Technol, Thin Film Technol Res Ctr, Seoul 130650, South Korea

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1998年 / 37卷 / 12B期

关键词：

regularization method; electron energy distribution function; broad beam gridded Xe ion sources; peripheral/divergent magnetic field;

D O I：

10.1143/JJAP.37.6906

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

In the present paper the possibility of application of the regularization method for reliable determination of the position and form of structural features of electron energy distribution is considered. The regularization method is used in the processing of the probe characteristics, measured in gas discharge chambers of broad beam gridded Xe ion sources, with peripheral and with divergent magnetic fields, as well as in an ion accelerator with closed electron drift. Electron energy distribution functions with secondary maxima are observed in the plasma devices.

引用

页码：6906 / 6915

页数：10

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