Improving fab productivity with new standards for equipment data acquisition

被引：0

作者：

Crispieri, Gino ^{[1
]}

机构：

[1] Int SEMATECH Mfg Initiat, Austin, TX 78741 USA

来源：

SOLID STATE TECHNOLOGY | 2007年 / 50卷 / 01期

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Deploying the set of new SEMI standards encompassing equipment data acquisition (EDA) enables the customization of requests by engineers and other fab personnel for equipment data. This enhanced ability to monitor equipment health and performance can directly improve fab productivity.

引用

页码：45 / +

页数：3

共 50 条

[31] SOFTWARE FOR DATA ACQUISITION AND ANALYSIS IN ANGLE STANDARDS CALIBRATION
Dobre, Miruna
Piree, Hugo
[J]. ADVANCED MATHEMATICAL AND COMPUTATIONAL TOOLS IN METROLOGY VII, 2006, 72 : 289 - 292
[32] Standards for PET Image Acquisition and Quantitative Data Analysis
Boellaard, Ronald
[J]. JOURNAL OF NUCLEAR MEDICINE, 2009, 50 : 11S - 20S
[33] DAS NEW PRODUCT ROUNDUP - THE LATEST OFFERINGS IN DATA ACQUISITION - LOGGING DEVICES, EQUIPMENT, AND SYSTEMS
CLEAVELAND, P
[J]. I&CS-INDUSTRIAL AND PROCESS CONTROL MAGAZINE, 1986, 59 (06): : 59 - 62
[34] Improving the Standards of Reporting of Clinical Trial Data
Ganju, Jitendra
[J]. THERAPEUTIC INNOVATION & REGULATORY SCIENCE, 2019,
[35] Improving the Standards of Reporting of Clinical Trial Data
Ganju, Jitendra
[J]. THERAPEUTIC INNOVATION & REGULATORY SCIENCE, 2020, 54 (03) : 717 - 722
[36] Improving the Standards of Reporting of Clinical Trial Data
Jitendra Ganju
[J]. Therapeutic Innovation & Regulatory Science, 2020, 54 : 717 - 722
[37] Data Acquisition for Improving Machine Learning Models
Li, Yifan
Yu, Xiaohui
Koudas, Nick
[J]. PROCEEDINGS OF THE VLDB ENDOWMENT, 2021, 14 (10): : 1832 - 1844
[38] COMPONENTS - NEW DESIGNS, STANDARDS AND THE IMPACT ON PLACEMENT EQUIPMENT
MILLER, H
YAGER, G
[J]. PROCEEDING OF THE TECHNICAL PROGRAM OF NEPCON WEST 89, VOLS 1 AND 2, 1989, : 555 - 560
[39] GENERAL STANDARDS FOR MACHINERY - NEW NORMS FOR ELECTRONIC EQUIPMENT
SKOFF, A
[J]. AEI AUTOMAZIONE ENERGIA INFORMAZIONE, 1994, 81 (06): : 643 - 648
[40] New Method of Fault Knowledge Acquisition of Electronic Equipment
Huo, Zhicheng
Sun, Qishun
Qi, Fengjun
Ding, Guobao
[J]. FRONTIERS OF MANUFACTURING AND DESIGN SCIENCE IV, PTS 1-5, 2014, 496-500 : 931 - 934

← 1 2 3 4 5 →