Improving fab productivity with new standards for equipment data acquisition

被引：0

作者：

Crispieri, Gino ^{[1
]}

机构：

[1] Int SEMATECH Mfg Initiat, Austin, TX 78741 USA

来源：

SOLID STATE TECHNOLOGY | 2007年 / 50卷 / 01期

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Deploying the set of new SEMI standards encompassing equipment data acquisition (EDA) enables the customization of requests by engineers and other fab personnel for equipment data. This enhanced ability to monitor equipment health and performance can directly improve fab productivity.

引用

页码：45 / +

页数：3

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