Optical and X-ray characterization of ferroelectric strontium-bismuth-tantalate (SBT) thin films

被引：2

作者：

Fried, M.

Petrik, P.

Horvath, Z. E.

Lohner, T.

Schmidt, C.

Schneider, C.

Ryssel, H.

机构：

[1] Res Inst Tech Phys & Mat Sci, H-1121 Budapest, Hungary

[2] Fraunhofer Inst Integrated Syst & Device Technol, D-91058 Erlangen, Germany

[3] Univ Erlangen Nurnberg, Chair Electron Devices, D-91058 Erlangen, Germany

来源：

APPLIED SURFACE SCIENCE | 2006年 / 253卷 / 01期

基金：

匈牙利科学研究基金会;

关键词：

spectroscopic ellipsometry; X-ray diffraction; grain size; ferroelectric materials;

D O I：

10.1016/j.apsusc.2006.06.009

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Metal-organic chemical vapor deposition (MOCVD) made layers of strontium-bismuth-tantalate (SBT) were characterized by spectroscopic ellipsometry (SE) using the Adachi model [S. Adachi, Phys. Rev. B 35 (1987) 7454-7463]. The evaluated optical parameters were correlated with the physical and chemical behavior examined by X-ray diffraction (XRD). As a result, it was possible to fit the measured spectra with the Adachi model in a wide range covering the region of the band gap. The Adachi model provides electronic layer parameters like the transition energy Eo and broadening F. Our investigations established a correlation between XRD-determined average grain size and the electronic layer parameters. (c) 2006 Elsevier B.V. All rights reserved.

引用

页码：349 / 353

页数：5

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