Growth kinetics of III-V compound semiconductors

被引:0
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作者
Dhanasekaran, R [1 ]
Ramasamy, P [1 ]
机构
[1] Anna Univ, Ctr Crystal Growth, Chennai 600025, India
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中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In the present communication, the recent developments in the growth kinetics of vapour phase epitaxy, liquid phase epitaxy and liquid phase electroepitaxy of III-V compound semiconductors have been reviewed. Investigations on the nucleation and growth mechanism of LII-V binary, ternary and quaternary compounds grown from VPE are presented, compared with the available experimental results and there is a good agreement between them. Computer simulation technique has been used to construct the concentration profiles of the solute atoms present in front of the crystal-solution interface during the Liquid Phase Epitaxy and Liquid Phase Electroepitaxy of III-V binary, ternary and quaternary compound semiconductors. The growth rate of the materials and hence the thickness of the grown films have also been determined.
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页码:350 / 353
页数:4
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