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- [21] Cathode spot plasma parameters in the breakdown stage of vacuum discharge PROCEEDINGS OF THE 27TH INTERNATIONAL SYMPOSIUM ON DISCHARGES AND ELECTRICAL INSULATION IN VACUUM (ISDEIV), VOL 1, 2016, : 57 - 59
- [23] The silicon breakdown-proof coatings deposition in RF discharge plasma 14TH INTERNATIONAL CONFERENCE ON FILMS AND COATINGS, 2019, 1281
- [26] DEVELOPMENT OF TECHNOLOGY FOR VACUUM SURFACE CONDITIONING BY RF PLASMA DISCHARGE COMBINED WITH DC DISCHARGE SCIENCE AND INNOVATION, 2021, 17 (04): : 33 - 43