Spherically Encapsulated Variable Liquid Lens on Coplanar Electrodes

被引：14
|
作者：
An, Jae Yong [1 ]
Hur, Ji Hwan [1 ]
Kim, Sohee [1 ,2 ]
Lee, Jong Hyun [1 ,2 ]
机构：
[1] Gwangju Inst Sci & Technol, Sch Mechatron, Kwangju 500712, South Korea
[2] Gwangju Inst Sci & Technol, Grad Program Med Syst Engn, Kwangju 500712, South Korea
来源：
IEEE PHOTONICS TECHNOLOGY LETTERS | 2011年 / 23卷 / 22期
关键词：
Electrooptic devices; lenses; micro fabrication; optical device fabrication; MICROLENS;
D O I：
10.1109/LPT.2011.2167606
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We herein demonstrated an electrowetting liquid lens using a spherical polymeric encapsulation on coplanar electrodes. In order to vary the focal length, the conductive inner lens was actuated by applying a voltage to the pinwheel-shaped coplanar electrodes. Silicone oil with a low vapor pressure was used as a nonconductive outer liquid lens, which was spherically encapsulated by chemical vapor deposition of thin-film polymer. The use of polymeric (parylene) encapsulation with coplanar indium-tin-oxide (ITO) electrodes provides a unique advantage in achieving an improved transparency, a wafer-level packaging of the liquid lens and the convenient accessibility of the electrical signal.
引用
收藏
页码：1703 / 1705
页数：3
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