Preparation of wide range refractive index diamond-like carbon films by means of plasma-enhanced chemical vapor deposition

被引：9
|
作者：
Gharibyan, A. [1 ]
Hayrapetyan, D. [1 ,2 ]
Panosyan, Zh. [1 ]
Yengibaryan, Ye. [1 ]
机构：
[1] State Engn Univ Armenia, Heliotech Lab, Yerevan 0009, Armenia
[2] Russian Armenian Slavon Univ, Yerevan 0051, Armenia
来源：
APPLIED OPTICS | 2011年 / 50卷 / 31期
关键词：
D O I：
10.1364/AO.50.000G69
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Plasma-enhanced chemical vapor deposition technology has been elaborated for obtaining diamond-like carbon (DLC) coatings of a wide range of properties. Alternative and direct bias voltages have been applied on the substrate, and refractive index dependencies upon various deposition technological parameters have been investigated. The frequency of the bias voltage has been varied in the region of 150-450 kHz. The maximum refractive index range that has been achieved is 1.46-3.2. Thin DLC films have been prepared on crystalline silicon substrates. Because of the wide range of physical, optical, and mechanical properties of the obtained films, they can successfully be applied in different fields of nano-optics. (C) 2011 Optical Society of America
引用
收藏
页码：G69 / G73
页数：5
相关论文
共 50 条
  • [21] The properties of fluorine containing diamond-like carbon films prepared by plasma-enhanced chemical vapour deposition
    Bendavid, A.
    Martin, P. J.
    Randeniya, L.
    Amin, M. S.
    DIAMOND AND RELATED MATERIALS, 2009, 18 (01) : 66 - 71
  • [22] High density plasma chemical vapor deposition of diamond-like carbon films
    Mousinho, AP
    Mansano, RD
    Massi, M
    Zambom, LS
    MICROELECTRONICS JOURNAL, 2003, 34 (5-8) : 627 - 629
  • [23] Synthesis and characterization of diamond-like carbon coatings for drill bits using plasma-enhanced chemical vapor deposition
    Vijaykumar S. Jatti
    Eyob Messele Sefene
    Ashwini V. Jatti
    Akshansh Mishra
    Rahul D. Dhabale
    The International Journal of Advanced Manufacturing Technology, 2023, 127 : 4081 - 4096
  • [24] Synthesis and characterization of diamond-like carbon coatings for drill bits using plasma-enhanced chemical vapor deposition
    Jatti, Vijaykumar S. S.
    Sefene, Eyob Messele
    Jatti, Ashwini V. V.
    Mishra, Akshansh
    Dhabale, Rahul D. D.
    INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY, 2023, 127 (9-10): : 4081 - 4096
  • [25] Microstructures and tribological properties of diamond-like carbon films grown by plasma enhanced chemical vapor deposition
    Yang, Li
    Chen, Qiang
    Zhang, Shouye
    Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology, 2009, 29 (03): : 292 - 297
  • [26] Parametric optimization of microhardness of diamond-like carbon films prepared by plasma enhanced chemical vapor deposition
    Bao, T
    Morrison, PW
    Woyczynski, WA
    THIN SOLID FILMS, 2005, 485 (1-2) : 27 - 41
  • [27] Substrate effect on the diamond-like carbon films synthesized by RF plasma enhanced chemical vapor deposition
    Tzeng, S. -S.
    Wu, W. -M.
    Hsu, J. -S.
    THERMEC 2006, PTS 1-5, 2007, 539-543 : 3574 - +
  • [28] Dual-Frequency Plasma Enhanced Chemical Vapor Deposition of Diamond-Like Carbon Thin Films
    Jamshidi, R.
    Hosseini, S. I.
    Ahmadizadeh, Y.
    ACTA PHYSICA POLONICA A, 2012, 122 (01) : 230 - 235
  • [29] Neutralization and discharge of electron traps in hydrogenated diamond-like carbon films deposited on ground electrode by plasma-enhanced chemical vapor deposition
    Yokota, Katsuhiro
    Nakatani, Takahiro
    Miyashita, Fumiyoshi
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2007, 46 (4A): : 1568 - 1570
  • [30] Hydrogen Effects on the Properties of Silicon/Nitrogen-Coincorporated Diamond-Like Carbon Films Prepared by Plasma-Enhanced Chemical Vapor Deposition
    Nakazawa, Hideki
    Okuno, Saori
    Miura, Soushi
    Kamata, Ryosuke
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2012, 51 (07)
12345