Preparation of wide range refractive index diamond-like carbon films by means of plasma-enhanced chemical vapor deposition

被引：9
|
作者：
Gharibyan, A. [1 ]
Hayrapetyan, D. [1 ,2 ]
Panosyan, Zh. [1 ]
Yengibaryan, Ye. [1 ]
机构：
[1] State Engn Univ Armenia, Heliotech Lab, Yerevan 0009, Armenia
[2] Russian Armenian Slavon Univ, Yerevan 0051, Armenia
来源：
APPLIED OPTICS | 2011年 / 50卷 / 31期
关键词：
D O I：
10.1364/AO.50.000G69
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Plasma-enhanced chemical vapor deposition technology has been elaborated for obtaining diamond-like carbon (DLC) coatings of a wide range of properties. Alternative and direct bias voltages have been applied on the substrate, and refractive index dependencies upon various deposition technological parameters have been investigated. The frequency of the bias voltage has been varied in the region of 150-450 kHz. The maximum refractive index range that has been achieved is 1.46-3.2. Thin DLC films have been prepared on crystalline silicon substrates. Because of the wide range of physical, optical, and mechanical properties of the obtained films, they can successfully be applied in different fields of nano-optics. (C) 2011 Optical Society of America
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页码：G69 / G73
页数：5
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