High-resolution, high-speed, low data age uncertainty, heterodyne displacement measuring interferometer electronics

被引：149
|
作者：
Demarest, FC [1 ]
机构：
[1] Zygo Corp, Middlefield, CT 06455 USA
来源：
MEASUREMENT SCIENCE AND TECHNOLOGY | 1998年 / 9卷 / 07期
关键词：
phase meters; heterodyne interferometry; laser measurement systems; photolithography;
D O I：
10.1088/0957-0233/9/7/003
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
An advanced displacement measuring interferometer system has been developed to satisfy the needs of semiconductor manufacturing and lithography. The system electronics provides a position resolution of 0.31 nm at velocities up to 2.1 m s(-1) when the system is used with a double-pass interferometer. Output data rates up to 10(7) samples per second are available. The data age, which is the delay from the interferometer optics to the measurement sample, can be adjusted to equalize differences between axes to within 1 ns. This low data age uncertainty is necessary for high-resolution, high-speed, multiple-axis measurements.
引用
收藏
页码：1024 / 1030
页数：7
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