Blazed grating fabrication through gray-scale X-ray lithography

被引：37

作者：

Mouroulis, P

Hartley, FT

Wilson, DW

White, VE

Shori, A

Nguyen, S

Zhang, M

Feldman, M

机构：

[1] CALTECH, Jet Prop Lab, Pasadena, CA 91109 USA

[2] Louisiana State Univ, Dept Elect & Comp Engn, Baton Rouge, LA 70803 USA

来源：

OPTICS EXPRESS | 2003年 / 11卷 / 03期

关键词：

D O I：

10.1364/OE.11.000270

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Blazed gratings have been fabricated using gray-scale X-ray lithography. The gratings have high efficiency, low parasitic light, and high groove quality. The fabrication technique and resist characterization are described. The gratings can be generated over a considerable range of distances from the X-ray mask, thus demonstrating the ability to write gratings on a substrate of effectively arbitrary shape. (C) 2003 Optical Society of America.

引用

页码：270 / 281

页数：12

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