Fabrication technologies of InP-based digital ICs and MMICs

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作者
Ishii, Y [1 ]
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[1] NIPPON TELEGRAPH & TEL PUBL CORP, LSI LABS, ATSUGI, KANAGAWA 24301, JAPAN
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TM [电工技术]; TN [电子技术、通信技术];
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0808 ; 0809 ;
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页码:53 / 56
页数:4
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