Laser polarization state measurement in heterodyne interferometry

被引：0
|
作者：
Lorier, DJ [1 ]
Knarren, BAWH [1 ]
Cosijns, SJAG [1 ]
Haitjema, H [1 ]
Schellekens, PHJ [1 ]
机构：
[1] Eindhoven Univ Technol, Dept Mech Engn, Precis Engn Sect, NL-5600 MB Eindhoven, Netherlands
来源：
CIRP ANNALS-MANUFACTURING TECHNOLOGY | 2003年 / 52卷 / 01期
关键词：
interferometry; measurement; non-linearity errors;
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
In heterodyne interferometry the accuracy is partly limited by non-linearity errors. These errors are caused by laser polarization state errors and errors of optical components, including alignment. In this paper we present two independent methods to measure the actual polarization state properties of the laser beam. Uncertainties and differences between the methods are discussed. Measurement of a commercially available laser source show ellipticity up to 1:170 in the E-fields and 0,3degrees deviation of orthogonality. This may cause a non-linearity calculated in a heterodyne interferometer of 0,6 nm.
引用
收藏
页码：439 / 442
页数：4
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