Characterization of FGM micro-switches under electrostatic and Casimir forces

This paper aims to investigate the nonlinear pull-in characteristics of the microswitches made of either homogeneous material or non-homogeneous functionally graded material (FGM) with two material phases under the combined electrostatic and intermolecular Casimir force. Principle of virtual work is used to derive the governing differential equation which is then solved using differential quadrature method (DQM). Pull-in voltage and pull-in deflection are obtained for micro-switches with three different boundary conditions (i.e. fixed-fixed, simple-fixed, and simply supported). The present solutions are validated through direct comparisons with experimental and other existing results reported in previous studies. A parametric study is conducted to show the significant effects of material composition, gap ratio, slenderness ratio, Casimir force, axial residual stress on the pull-in instability.