Research on Vacuum Utraviolet Calibration Technology

被引：0
|
作者：
Wang, Jiapeng [1 ]
Gao, Shumin [1 ]
Sun, Hongsheng [1 ]
Chen, Yinghang [1 ]
Wei, Jianqiang [1 ]
机构：
[1] Beijing Zhenxing Inst Metrol & Measurement, Beijing 100074, Peoples R China
来源：
INTERNATIONAL SYMPOSIUM ON OPTOELECTRONIC TECHNOLOGY AND APPLICATION 2014: IMAGING SPECTROSCOPY; AND TELESCOPES AND LARGE OPTICS | 2014年 / 9298卷
关键词：
vacuum ultraviolet; payload; spectral response; spectral radiation; calibration;
D O I：
10.1117/12.2075287
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Importance of extreme ultraviolet (EUV) and far ultraviolet (FUV) calibration is growing fast as vacuum ultraviolet payloads are wildly used in national space plan. A calibration device is established especially for the requirement of EUV and FUV metrology and measurement. Spectral radiation and detector relative spectral response at EUV and FUV wavelengths can be calibrated with accuracy of 26% and 20%, respectively. The setup of the device, theoretical model and value retroactive method are introduced and measurement of detector relative spectral response from 30 nm to 200 nm is presented in this paper. The calibration device plays an important role in national space research.
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页数：8
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