AN AMBIENT TEMPERATURE COMPENSATED MICROTHERMAL CONVECTIVE ACCELEROMETER WITH HIGH SENSITIVITY STABILITY

For the first time, we reported both theoretical (a one-dimensional (ID) theoretical model) and experimental analysis on the ambient temperature (Ta) effect on the sensitivity of microthermal convective accelerometer (MTCA). Our work reveals that the sensitivity variations are not only affected by the thermal fluid properties but also relevant to the redistributed temperature field within the MTCA's enclosing chamber at different ambient temperatures. The sensitivity attenuation function is precisely predicted by the newly proposed 1D model, which could be effectively applied for compensating the common sensitivity drifting problem of MICA. An MTCA with high sensitivity stability is created by improving the compensation error from 65% to 1.84%, which could be beneficial for precise measurement and the applications in the ambient changing environment.