Nanometer measurement with interpolation electronics

被引:0
|
作者
Lin, Jium-Ming [1 ]
Hwang, Shau-Chieh [1 ]
机构
[1] Chung Hua Univ, Dept Mech Engn, Hsinchu, Taiwan
关键词
LVDT; interpolation circuit; quadrature decoder; quadrature-phase interferometer;
D O I
暂无
中图分类号
TP [自动化技术、计算机技术];
学科分类号
0812 ;
摘要
This paper integrated multi-domain know-ledge of electronics, optics, control as well as precision measurement, and proposing a high resolution subdividing electronics module to the sinusoidal encoder output of a positioning motor, such that the module can not only be used as a counter for linear and/or angular measurements, but also subdivide the periods of the sinusoidal encoder signals up to 1600 times. From the results of experiment test it can be seen that the whole module is suitable for those applications requiring high-resolution encoder, nanometer measurement as well as fast data acquisition with phase tolerance of 45 degrees.
引用
收藏
页码:989 / 994
页数:6
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