Fabrication of directed nano wire networks through self-assembly

被引:1
|
作者
Alaca, E [1 ]
Sehitoglu, H [1 ]
Saif, T [1 ]
机构
[1] Univ Illinois, Dept Mech & Ind Engn, Urbana, IL 61801 USA
关键词
D O I
10.1109/MEMS.2004.1290610
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We present a major development in our novel, self-assembly-based nano wire fabrication method. When it was first reported in MEMS 2003 [1], the method could successfully produce a network of nano wires that are 50 nm in width and hundreds of microns long despite little control on the global shape of the network itself. However, the recent development enables us to impose very complicated shapes on the nano wire network by assigning points of wire initiation and termination by means of simple lithography. Hence, 1) the number, and 2) the direction of nano wires can be dictated.
引用
收藏
页码:415 / 417
页数:3
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