Multi imaging-based beam shaping for ultrafast laser-material processing using spatial light modulators

被引：35
|
作者：
Li, Jiangning [1 ]
Tang, Yue [1 ]
Kuang, Zheng [1 ]
Schille, Joerg [2 ]
Loeschner, Udo [2 ]
Perrie, Walter [1 ]
Liu, Dun [3 ]
Dearden, Geoff [1 ]
Edwardson, Stuart [1 ]
机构：
[1] Univ Liverpool, Sch Engn, Laser Grp, Brownlow St, Liverpool L69 3GQ, Merseyside, England
[2] Laserinst Hsch Mittweida, Technikumpl 17, D-09648 Mittweida, Germany
[3] Hubei Univ Technol, Sch Mech Engn, Wuhan 430068, Hubei, Peoples R China
来源：
OPTICS AND LASERS IN ENGINEERING | 2019年 / 112卷
关键词：
Laser beam shaping; Laser parallel beam processing; Spatial light modulator; ABLATION; PULSES;
D O I：
10.1016/j.optlaseng.2018.09.002
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
An imaging based beam shaping technique combined with parallel beam processing has been demonstrated. Binary and intensity masks have been designed and applied on phase only spatial light modulator (SLM) to shape the input laser beam in the desired profile and intensity distribution. A second SLM with a computer generated hologram(CGH) applied was used to split the incident picosecond laser beam. Hence, the laser beam was effectively converted to required target shape, intensity distribution and a separated pattern then reconstructed at the image plane of a focusing lens. The machined footprints on a polished Titanium (Ti6Al4V) substrate accurately match the desired beam in shape and depth distribution.
引用
收藏
页码：59 / 67
页数：9
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