Beam shaping using two spatial light modulators for ultrashort pulse laser ablation of metals

被引：5
|
作者：
Mikhaylov, Dmitriy [1 ,3 ]
Kiedrowski, Thomas [2 ]
Lasagni, Andres F. [3 ,4 ]
机构：
[1] Robert Bosch Mfg Solut GmbH, Postbox 30 02 20, D-70442 Stuttgart, Germany
[2] Robert Bosch GmbH, Robert Bosch Campus 1, D-71272 Renningen, Germany
[3] Tech Univ Dresden, Inst Mfg Technol, George Bahr Str 3c, D-01069 Dresden, Germany
[4] Fraunhofer Inst Werkstoff & Strahltech IWS, Winterbergstr 28, D-01277 Dresden, Germany
来源：
LASER-BASED MICRO- AND NANOPROCESSING XIII | 2019年 / 10906卷
关键词：
Laser beam shaping; spatial light modulator; laser material processing; ALGORITHM;
D O I：
10.1117/12.2508682
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
In this study, an optical setup based on two phase-only spatial light modulators is presented, capable to shape two parallel laser beams. Each of the light modulators creates different and complementary Gaussian multi-spot distributions in the focal plane. By the polarization based combination of two differently shaped beams, a multi-spot beam profile with higher multi-spot density than for a single spatial light modulator setup can be obtained without speckles to appear. Beam shaping results are characterized by means of a beam profile camera and compared to a single spatial light modulator setup. Beam shapes generated by the presented setup are applied to ultrashort pulse laser ablation of metals. The potential of the presented optics is discussed regarding ground roughness and waviness of the ablated structure.
引用
收藏
页数：11
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