Study on Optical Properties of Two-Color Microbolometers

被引：1
|
作者：
Zhao, Henan [1 ]
Wang, Tao [1 ]
Yu, He [1 ]
Chen, Chao [1 ]
Jiang, Yadong [1 ]
机构：
[1] Univ Elect Sci & Technol China, State Key Lab Elect Thin Films & Integrated Devic, Chengdu 610054, Peoples R China
来源：
5TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES: OPTOELECTRONIC MATERIALS AND DEVICES FOR DETECTOR, IMAGER, DISPLAY, AND ENERGY CONVERSION TECHNOLOGY | 2010年 / 7658卷
关键词：
Microbolometer; two-color; infrared absorptivity;
D O I：
10.1117/12.866319
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
In this article, the practical structure of two-color microbolometers for uncooled infrared detection was considered, a mathematical model to calculate infrared absorptance was described. The optical characteristic of multilayer structure consisting of Nitride (SiNx) infrared absorber film/ Vanadium (VOx) heat sensitive film/ SiNx support film/ the first optical resonant cavity/ a tunable reflecting Al micromirror/ the second optical resonant cavity /a bottom electrode made up of Al was investigated. According to optical admittance matrix theory, relation between infrared absorber film thickness, the first optical resonant cavity of two-color microbolometer and infrared absorptivity was simulated by MATLAB software.
引用
收藏
页数：6
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