ULTRA-COMPACT MICROMIRROR WITH POLYMERIC HARD MAGNET FOR USE IN ENDOSCOPIC IMAGING

被引：0
|
作者：
Weber, N. [1 ]
Hertkorn, D. [1 ]
Zappe, H. [1 ]
Seifert, A. [1 ]
机构：
[1] Univ Freiburg, Dept Microsyst Engn IMTEK, D-7800 Freiburg, Germany
来源：
2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS) | 2011年
关键词：
OPTICAL COHERENCE TOMOGRAPHY;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
An ultra-compact magnetically actuated micromirror with a polymeric hard magnetic layer on its back-side is developed for use in an endoscopic probe. This novel construction yields high deflection angles at extremely low magnetic fields which can be generated by a separate actuation coil. As no direct electrical connection is required for operating the micromirror, it can be mounted on a rotating platform and used for tubular scanning of the interior of body passageways or blood vessels.
引用
收藏
页码：732 / 735
页数：4
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