Elaboration of Transparent Undoped ZnO and Al-Doped ZnO Thin Films by Spray Pyrolysis and their Properties

被引：7

作者：

Rahmane, Saad ^{[1
]}

Aida, Mohamed Salah ^{[2
]}

Chala, Abdelouahad ^{[1
]}

Ben Temam, Hachemi ^{[1
]}

Djouadi, Abdou ^{[3
]}

机构：

[1] Univ Biskra, Lab Chim Appl, Biskra 07000, Algeria

[2] Univ Mentouri, Lab Couches Minces & Interfaces, Constantine 25000, Algeria

[3] Inst Mat Jean Rouxell, Lab Plasmas & Couches Minces, F-44000 Nantes, France

来源：

PLASMA PROCESSES AND POLYMERS | 2007年 / 4卷

关键词：

Al-doped ZnO; pyrolysis; spray pyrolysis; thin films; ZnO undoped;

D O I：

10.1002/ppap.200730908

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

This work describes the preparation of zinc oxide thin films using a simple and inexpensive spray pyrolysis technique of zinc chloride (ZnCl2) and aluminum chloride (AlCl3) onto glass substrates. Structural, optical, and electrical properties are determined in the temperature range of 350-600 degrees C. All the films prepared were uniform and well adherent to the substrates, XRD studies showed that the films grow with (002) preferred orientation. Estimated band gap energy from optical absorption data was 3.2-3.4 eV. The measured electrical conductivity at room temperature was found in the order of 10(-1)(Omega . cm)(-1) for ZnO and it is higher by two orders of magnitude for ZnO:Al.

引用

页码：S356 / S358

页数：3

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