Thermal degradation behavior of aluminum-doped zinc-oxide thin films prepared by using a sol-gel process

被引：5

作者：

Lee, Seoung-Soo ^{[1
]}

Kim, Yong-Nam ^{[1
]}

Shin, Hyun-Gyoo ^{[1
]}

Song, Jun-Kwang ^{[1
]}

Lee, Hee-Soo ^{[2
]}

机构：

[1] Korea Testing Lab, Mat Anal Team, Seoul 152718, South Korea

[2] Pusan Natl Univ, Sch Mat Sci & Engn, Pusan 609735, South Korea

来源：

JOURNAL OF THE KOREAN PHYSICAL SOCIETY | 2008年 / 53卷 / 01期

关键词：

aluminum-doped zinc-oxide; thin film; sol-gel; thermal degradation;

D O I：

10.3938/jkps.53.188

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

The present research reports the thermal degradation behavior of aluminum-doped zinc-oxide (AZO) thin films coated on glass substrates by using a sol-gel method. The thermal degradation behavior was investigated through changes in the resistivity of the thermally degraded AZO films, which were compared with that of normal one. The thermal degradation of AZO films is discussed based on the results of scanning electron microscope (SEM), atomic force microscope (AFM), X-ray diffraction (XRD) and Hall effect measurements.

引用

页码：188 / 191

页数：4

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