Direct-write microbatteries as integrated power sources for microelectronic devices

We are using a novel laser-based direct-write process to rapidly prototype and fabricate microbattery systems for microelectronics. A range of battery designs and arrays can be fabricated with this low-temperature, ambient-pressure, CAD/CAM process using commercially available materials. The capacity of the batteries can then be tuned to optimize the performance of a specific device. We demonstrate this with the fabrication of planar RuOxHy pseudocapacitors. The width and sizes of the cell interfaces are micromachined with the same laser system to change the capacity of the systems. The cell performance is repeatable and can be easily integrated into arrays to modify the capacity of the system.