Growth of Large-Area and Highly Crystalline MoS2 Thin Layers on Insulating Substrates

被引:1710
|
作者
Liu, Keng-Ku [1 ]
Zhang, Wenjing [1 ]
Lee, Yi-Hsien [1 ]
Lin, Yu-Chuan [1 ]
Chang, Mu-Tung [2 ]
Su, ChingYuan [3 ]
Chang, Chia-Seng [2 ]
Li, Hai [4 ]
Shi, Yumeng [6 ]
Zhang, Hua [4 ]
Lai, Chao-Sung [3 ]
Li, Lain-Jong [1 ,5 ]
机构
[1] Acad Sinica, Inst Atom & Mol Sci, Taipei 10617, Taiwan
[2] Acad Sinica, Inst Phys, Taipei 11529, Taiwan
[3] Chang Gung Univ, Dept Elect Engn, Tao Yuan 333, Taiwan
[4] Nanyang Technol Univ, Sch Mat Sci & Engn, Singapore, Singapore
[5] Natl Chiao Tung Univ, Dept Photon, Hsinchu 300, Taiwan
[6] MIT, Dept Elect Engn & Comp Sci, Cambridge, MA 02139 USA
关键词
Transition metal dichalcogenides; molybdenum disulfide; layered materials; transistors; two-dimensional materials; semiconductors; PHOTOLUMINESCENCE; EXFOLIATION; GRAPHENE; FILMS;
D O I
10.1021/nl2043612
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
The two-dimensional layer of molybdenum disulfide (MoS2) has recently attracted much interest due to its direct-gap property and potential applications in optoelectronics and energy harvesting. However, the synthetic approach to obtain high-quality and large-area MoS2 atomic thin layers is still rare. Here we report that the high-temperature annealing of a thermally decomposed ammonium thiomolybdate layer in the presence of sulfur can produce large-area MoS2 thin layers with superior electrical performance on insulating substrates. Spectroscopic and microscopic results reveal that the synthesized MoS2 sheets are highly crystalline. The electron mobility of the bottom-gate transistor devices made of the synthesized MoS2 layer is comparable with those of the micromechanically exfoliated thin sheets from MoS2 crystals. This synthetic approach is simple, scalable, and applicable to other transition metal dichalcogenides. Meanwhile, the obtained MoS2 films are transferable to arbitrary substrates, providing great opportunities to make layered composites by stacking various atomically thin layers.
引用
收藏
页码:1538 / 1544
页数:7
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