Large-Area Vapor-Phase Growth and Characterization of MoS2 Atomic Layers on a SiO2 Substrate

被引:1566
|
作者
Zhan, Yongjie [1 ]
Liu, Zheng [1 ]
Najmaei, Sina [1 ]
Ajayan, Pulickel M. [1 ]
Lou, Jun [1 ]
机构
[1] Rice Univ, Dept Mech Engn & Mat Sci, Houston, TX 77005 USA
基金
美国国家科学基金会;
关键词
molybdenum disulphide; 2D crystals; atomic layers; chemical vapor deposition; X-RAY PHOTOELECTRON; MOO3; NANOBELTS; GRAPHENE FILMS; TRANSISTORS; FULLERENES; NANOTUBES; SPECTRA;
D O I
10.1002/smll.201102654
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
引用
收藏
页码:966 / 971
页数:6
相关论文
共 50 条
  • [1] Towards large area and continuous MoS2 atomic layers via vapor-phase growth: thermal vapor sulfurization
    Liu, Hongfei
    Antwi, K. K. Ansah
    Ying, Jifeng
    Chua, Soojin
    Chi, Dongzhi
    [J]. NANOTECHNOLOGY, 2014, 25 (40)
  • [2] Synthesis of Large-Area MoS2 Atomic Layers with Chemical Vapor Deposition
    Lee, Yi-Hsien
    Zhang, Xin-Quan
    Zhang, Wenjing
    Chang, Mu-Tung
    Lin, Cheng-Te
    Chang, Kai-Di
    Yu, Ya-Chu
    Wang, Jacob Tse-Wei
    Chang, Chia-Seng
    Li, Lain-Jong
    Lin, Tsung-Wu
    [J]. ADVANCED MATERIALS, 2012, 24 (17) : 2320 - 2325
  • [3] Photoresponse properties of large-area MoS2 atomic layer synthesized by vapor phase deposition
    Luo, Siwei
    Qi, Xiang
    Ren, Long
    Hao, Guolin
    Fan, Yinping
    Liu, Yundan
    Han, Weijia
    Zang, Chen
    Li, Jun
    Zhong, Jianxin
    [J]. JOURNAL OF APPLIED PHYSICS, 2014, 116 (16)
  • [4] Synthesis and characterization of large-area and continuous MoS2 atomic layers by RF magnetron sputtering
    Hussain, Sajjad
    Shehzad, Muhammad Arslan
    Vikraman, Dhanasekaran
    Khan, Muhammad Farooq
    Singh, Jai
    Choi, Dong-Chul
    Seo, Yongho
    Eom, Jonghwa
    Lee, Wan-Gyu
    Jung, Jongwan
    [J]. NANOSCALE, 2016, 8 (07) : 4340 - 4347
  • [5] Rapid and Large-Area Visualization of Grain Boundaries in MoS2 on SiO2 Using Vapor Hydrofluoric Acid
    Fan, Xuge
    Siris, Rita
    Hartwig, Oliver
    Duesberg, Georg S.
    Niklaus, Frank
    [J]. ACS APPLIED MATERIALS & INTERFACES, 2020, 12 (30) : 34049 - 34057
  • [6] Glass-assisted CVD growth of large-area MoS2, WS2 and MoSe2 monolayers on Si/SiO2 substrate
    Ozkucuk, Gonca Uslu
    Odaci, Cem
    Sahin, Ezgi
    Ay, Feridun
    Perkgoz, Nihan Kosku
    [J]. MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2020, 105
  • [7] Large-Area Buckled MoS2 Films on the Graphene Substrate
    Kim, Seon Joon
    Kim, Dae Woo
    Lim, Joonwon
    Cho, Soo-Yeon
    Kim, Sang Ouk
    Jung, Hee-Tae
    [J]. ACS APPLIED MATERIALS & INTERFACES, 2016, 8 (21) : 13512 - 13519
  • [8] Direct vapor phase growth process and robust photoluminescence properties of large area MoS2 layers
    V. Senthilkumar
    Le C. Tam
    Yong Soo Kim
    Yumin Sim
    Maeng-Je Seong
    Joon. I. Jang
    [J]. Nano Research, 2014, 7 : 1759 - 1768
  • [9] Growth of Large-Area and Highly Crystalline MoS2 Thin Layers on Insulating Substrates
    Liu, Keng-Ku
    Zhang, Wenjing
    Lee, Yi-Hsien
    Lin, Yu-Chuan
    Chang, Mu-Tung
    Su, ChingYuan
    Chang, Chia-Seng
    Li, Hai
    Shi, Yumeng
    Zhang, Hua
    Lai, Chao-Sung
    Li, Lain-Jong
    [J]. NANO LETTERS, 2012, 12 (03) : 1538 - 1544
  • [10] Direct vapor phase growth process and robust photo-luminescence properties of large area MoS2 layers
    Senthilkumar, V.
    Tam, Le C.
    Kim, Yong Soo
    Sim, Yumin
    Seong, Maeng-Je
    Jang, Joon. I.
    [J]. NANO RESEARCH, 2014, 7 (12) : 1759 - 1768