The design and experiment of ion generator power supply for vacuum sputtering

被引：0
|
作者：
Chen, Wen-Guang [1 ]
Rao, Yi-Hua [1 ]
Shan, Chang-Hong [1 ]
Fujita, Goro [2 ]
Yasutoshi, Takemoto [2 ]
机构：
[1] Nanhua Univ, Dept Elect Engn, Hengyang 421001, Hunan Province, Peoples R China
[2] Shibaura Inst Technol, Dept Elect Engn, Koto Ku, Tokyo 1358548, Japan
来源：
2007 POWER CONVERSION CONFERENCE - NAGOYA, VOLS 1-3 | 2007年
关键词：
phase-shift PWM; resonant inverter; soft switching; ion assistant sputtering;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A LCLC series-parallel high-frequency ac/ac resonant inverter configure for ion assistant vacuum-sputtering manufacture film is proposed. The characteristic of the sputtering chamber and a simplified stead-state analysis of the inverter, using complex circuit analysis, are presented. The control implementation circuit block diagram is introduced to the resonant inverter, which can implement the output current regulation and variable frequency operation simultaneity; the system stability benefits from this control method. It is suitable for the characteristic of chamber load, and the switching losses to be lower as much as possible in such large dynamic load. The 15 kW-30A prototype power supply is described, and experimental results are given.
引用
收藏
页码：902 / +
页数：2
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