The design and experiment of ion generator power supply for vacuum sputtering

被引：0
|
作者：
Chen, Wen-Guang [1 ]
Rao, Yi-Hua [1 ]
Shan, Chang-Hong [1 ]
Fujita, Goro [2 ]
Yasutoshi, Takemoto [2 ]
机构：
[1] Nanhua Univ, Dept Elect Engn, Hengyang 421001, Hunan Province, Peoples R China
[2] Shibaura Inst Technol, Dept Elect Engn, Koto Ku, Tokyo 1358548, Japan
来源：
2007 POWER CONVERSION CONFERENCE - NAGOYA, VOLS 1-3 | 2007年
关键词：
phase-shift PWM; resonant inverter; soft switching; ion assistant sputtering;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A LCLC series-parallel high-frequency ac/ac resonant inverter configure for ion assistant vacuum-sputtering manufacture film is proposed. The characteristic of the sputtering chamber and a simplified stead-state analysis of the inverter, using complex circuit analysis, are presented. The control implementation circuit block diagram is introduced to the resonant inverter, which can implement the output current regulation and variable frequency operation simultaneity; the system stability benefits from this control method. It is suitable for the characteristic of chamber load, and the switching losses to be lower as much as possible in such large dynamic load. The 15 kW-30A prototype power supply is described, and experimental results are given.
引用
收藏
页码：902 / +
页数：2
相关论文
共 50 条
  • [1] Investigation of a pulsed magnetron sputtering discharge with a vacuum pentode modulator power supply
    Kuzmichev, A
    Sidorenko, S
    Steffen, H
    Hippler, R
    Kulikovsky, V
    [J]. VACUUM, 2003, 72 (01) : 59 - 69
  • [2] Power supply design for the tracker detector of the AMS experiment
    Menichelli, M
    Battiston, R
    Bizzarri, M
    Checcucci, B
    Castellini, G
    Bakki, P
    Banfalvi, A
    Blasko, S
    Gschwindt, A
    Szabo, J
    Fontani, L
    Pasuello, G
    [J]. 1996 IEEE NUCLEAR SCIENCE SYMPOSIUM - CONFERENCE RECORD, VOLS 1-3, 1997, : 692 - 696
  • [3] Design of fast pulse generator for Kicker power supply in HIAF
    Liu, Y.
    Gao, D. Q.
    Zhao, J.
    Gao, J.
    Shang-guan, J. B.
    [J]. HEAVY ION ACCELERATOR TECHNOLOGY 2018, 2020, 1401
  • [4] Design of Bias Power Supply for Magnetron Sputtering with Automatic Equalization Current
    Huang, Xiping
    Chen, Guitao
    Nie, Yanlin
    [J]. PROCEEDINGS OF THE 2017 INTERNATIONAL CONFERENCE ON ELECTRONIC INDUSTRY AND AUTOMATION (EIA 2017), 2017, 145 : 199 - 203
  • [5] A TRIGGER POWER-SUPPLY FOR VACUUM-ARC ION SOURCES
    WATT, GC
    EVANS, PJ
    [J]. IEEE TRANSACTIONS ON PLASMA SCIENCE, 1993, 21 (05) : 547 - 551
  • [6] The Power Supply of the Hydrogen Generator
    Gorecki, Krzysztof
    Zarebski, Janusz
    Gorecki, Pawel
    Halbryt, Slawomir
    [J]. 3RD INTERNATIONAL CONGRESS ON ENERGY EFFICIENCY AND ENERGY RELATED MATERIALS (ENEFM2015), 2017,
  • [7] Design of A New Discharge Power Supply for Ion Engine
    Nagano, Hiroshi
    Kajiwara, Kenichi
    Osuga, Hiroyuki
    Ozaki, Toshiyuki
    Shuto, Kazuo
    [J]. PROCEEDINGS OF 14TH INTERNATIONAL POWER ELECTRONICS AND MOTION CONTROL CONFERENCE (EPE-PEMC 2010), 2010,
  • [8] Design characteristics of a microgrid controller for an uninterruptible power supply with a photovoltaic generator
    Aguirre Matteo, Cristian Daniel
    Julian Itzcovich, Marcelo
    Ariel Schenberger, Leonardo
    Francisco Bordon, Cesar
    Jorge Penco, Jose
    Maria Chezzi, Carlos
    [J]. 2020 IEEE PES TRANSMISSION & DISTRIBUTION CONFERENCE AND EXHIBITION - LATIN AMERICA (T&D LA), 2020,
  • [9] Design and simulations of medium frequency power supply for plasma processing and magnetron sputtering
    Zapart, Mateusz
    Worek, Cezary
    [J]. PRZEGLAD ELEKTROTECHNICZNY, 2022, 98 (02): : 98 - 101
  • [10] A power supply for magnetron sputtering systems
    N. S. Sochugov
    V. O. Oskirko
    R. E. Spirin
    [J]. Instruments and Experimental Techniques, 2013, 56 : 178 - 184
12345