New figuring model based on surface slope profile for grazing-incidence reflective optics

被引:19
|
作者
Zhou, Lin [1 ,2 ,3 ]
Huang, Lei [2 ]
Bouet, Nathalie [2 ]
Kaznatcheev, Konstantine [2 ]
Vescovi, Matthew [2 ]
Dai, Yifan [1 ,3 ]
Li, Shengyi [1 ,3 ]
Idir, Mourad [2 ]
机构
[1] Natl Univ Def Technol, Coll Mechatron Engn & Automat, 109 Deya Rd, Changsha 410073, Hunan, Peoples R China
[2] Brookhaven Natl Lab, NSLS 2, POB 5000, Upton, NY 11973 USA
[3] Hunan Key Lab Ultraprecis Machining Technol, 47 Yanzheng St, Changsha 410073, Hunan, Peoples R China
来源
基金
中国国家自然科学基金;
关键词
ion beam figuring; synchrotron optics; one-dimensional; surface slope; MEASURING MACHINE; MIRRORS;
D O I
10.1107/S1600577516010882
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
Surface slope profile is widely used in the metrology of grazing-incidence reflective optics instead of surface height profile. Nevertheless, the theoretical and experimental model currently used in deterministic optical figuring processes is based on surface height, not on surface slope. This means that the raw slope profile data from metrology need to be converted to height profile to perform the current height-based figuring processes. The inevitable measurement noise in the raw slope data will introduce significant cumulative error in the resultant height profiles. As a consequence, this conversion will degrade the determinism of the figuring processes, and will have an impact on the ultimate surface figuring results. To overcome this problem, an innovative figuring model is proposed, which directly uses the raw slope profile data instead of the usual height data as input for the deterministic process. In this paper, first the influence of the measurement noise on the resultant height profile is analyzed, and then a new model is presented; finally a demonstration experiment is carried out using a one-dimensional ion beam figuring process to demonstrate the validity of our approach.
引用
收藏
页码:1087 / 1090
页数:4
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