Optimal design of SAW-based gyroscope to improve the sensitivity

被引：0
|
作者：
Oh, Haekwan [1 ]
Yang, Sangsik [1 ]
Lee, Keekeun [1 ]
机构：
[1] Ajou Univ, Div Elect Engn, Suwon 441749, South Korea
来源：
RELIABILITY, PACKAGING, TESTING, AND CHARACTERIZATION OF MEMS/MOEMS AND NANODEVICES IX | 2010年 / 7592卷
关键词：
Coriolis force; Couple of mode (COM); Progressive wave; SAW gyroscope; SAW oscillator;
D O I：
10.1117/12.841531
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
A surface acoustic wave (SAW)-based gyroscope was developed on a piezoelectric substrate. The developed gyroscope consists of two SAW oscillators, metallic dots, and absorber. Coupling of mode (COM) modeling was conducted to determine the optimal device parameters prior to fabrication. Depending on the angular velocity, the difference of the oscillation frequency was modulated. The obtained sensitivity was approximately 52.35 Hz/ deg center dot s at an angular rate range of 0 similar to 1000 deg/ s.
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页数：10
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