Structural and optical characterization of DC magnetron sputtered molybdenum oxide films

被引：4
|
作者：
Nirupama, V. [1 ]
Reddy, P. Sreedhara [1 ]
Hussain, O. M. [1 ]
Uthanna, S. [1 ]
机构：
[1] Sri Venkateswara Univ, Dept Phys, Tirupati 517502, Andhra Pradesh, India
来源：
IONICS | 2007年 / 13卷 / 06期
关键词：
molybdenum trioxide; magnetron sputtering; thin films; structure; optical properties;
D O I：
10.1007/s11581-007-0132-9
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
Thin films of molybdenum trioxide were deposited on glass substrates employing direct current (DC) magnetron sputtering by sputtering of molybdenum at different oxygen partial pressures in the range 8 x 10(-5) -1 x 10(-3) mbar and at a substrate temperature of 473 K. The glow discharge characteristics of magnetron cathode target of molybdenum were studied. The influence of oxygen partial pressure on the structural and optical properties of molybdenum trioxide films was investigated. The films formed at an optimum oxygen partial pressure of 2 x 10(-4) mbar were polycrystalline in nature with orthorhombic alpha- phase and an optical band gap of 3.16 eV. The refractive index of the films formed at an oxygen partial pressure of 2 x 10(-4) mbar decreased from 2.08 to 1.89 with increase of wavelength from 450 to 1,000 nm, respectively.
引用
收藏
页码：451 / 454
页数：4
相关论文
共 50 条
  • [1] Structural and optical characterization of DC magnetron sputtered molybdenum oxide films
    V. Nirupama
    P. Sreedhara Reddy
    O. M. Hussain
    S. Uthanna
    [J]. Ionics, 2007, 13 : 451 - 454
  • [2] Effect of oxygen partial pressure on the structural and optical properties of dc reactive magnetron sputtered molybdenum oxide films
    Nirupama, V.
    Gunasekhar, K. R.
    Sreedhar, B.
    Uthanna, S.
    [J]. CURRENT APPLIED PHYSICS, 2010, 10 (01) : 272 - 278
  • [3] Structural and Optical Properties of DC Reactive Magnetron Sputtered Zinc Aluminum Oxide Thin Films
    Kumar, B. Rajesh
    Rao, T. Subba
    [J]. LIGHT AND ITS INTERACTIONS WITH MATTER, 2014, 1620 : 118 - 122
  • [4] Synthesis and Characterization of DC Magnetron Sputtered Nano Structured Molybdenum Thin Films
    Rondiya, S. R.
    Rokade, A. V.
    Jadhavar, A. A.
    Pandharkar, S. M.
    Kulkarni, R. R.
    Karpe, S. D.
    Diwate, K. D.
    Jadkar, S. R.
    [J]. 2ND INTERNATIONAL CONFERENCE ON EMERGING TECHNOLOGIES: MICRO TO NANO 2015 (ETMN-2015), 2016, 1724
  • [5] Effect of substrate temperature on the structural, optical and electrical properties of dc magnetron sputtered tantalum oxide films
    Chandra, S. V. Jagadeesh
    Uthanna, S.
    Rao, G. Mohan
    [J]. APPLIED SURFACE SCIENCE, 2008, 254 (07) : 1953 - 1960
  • [6] Influence of oxygen pressure on the structural and optical properties of DC magnetron reactive sputtered cadmium oxide films
    Subramanyam, TK
    Uthanna, S
    Naidu, BS
    [J]. PHYSICA SCRIPTA, 1998, 57 (02): : 317 - 320
  • [7] Modification of optical and structural properties of DC magnetron sputtered tungsten oxide thin films for electrochromic application
    Yaemsanguansak, Phasin
    Sittishoktram, Manas
    Tuayjaroen, Rungroj
    Ketsombun, Ekkaphop
    Lertvanithphol, Tossaporn
    Luangchaisri, Chumphon
    Jutarosaga, Tula
    [J]. JOURNAL OF METALS MATERIALS AND MINERALS, 2019, 29 (02): : 79 - 86
  • [8] Structure and optical properties of dc reactive magnetron sputtered zinc oxide films
    Subramanyam, TK
    Naidu, BS
    Uthanna, S
    [J]. CRYSTAL RESEARCH AND TECHNOLOGY, 1999, 34 (08) : 981 - 988
  • [9] Optical and structural differences between RF and DC AlxNy magnetron sputtered films
    Dumitru, V
    Morosanu, C
    Sandu, V
    Stoica, A
    [J]. THIN SOLID FILMS, 2000, 359 (01) : 17 - 20
  • [10] Electrical, optical and surface characterization of reactive RF magnetron sputtered molybdenum oxide films for solar cell applications
    Mehmood, Haris
    Bektas, Gence
    Yildiz, Ilker
    Tauqeer, Tauseef
    Nasser, Hisham
    Turan, Rasit
    [J]. MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2019, 101 : 46 - 56
12345