A novel method to enhance the sensitivity for two-degrees-of-freedom straightness measurement

被引:18
|
作者
Kuang, Cuifang [1 ,3 ]
Hong, En [2 ]
Feng, Qibo [1 ]
Zhang, Bin [1 ]
Zhang, Zhifeng [1 ]
机构
[1] Beijing Jiaotong Univ, Sch Sci, Beijing 100044, Peoples R China
[2] Univ Michigan, Dept Mech Engn, Ann Arbor, MI 48109 USA
[3] Beijing Inst Technol, Sch Informat Sci & Technol, Beijing 100081, Peoples R China
关键词
straightness errors; two-degrees-of-freedom; laser measurement; laser collimated; linear guide way;
D O I
10.1088/0957-0233/18/12/014
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A low cost and high precision system which can measure two-degrees-of-freedom straightness simultaneously is proposed based on a laser collimator. In the system, a miniature fiber coupled diode laser generates a collimating beam. The sensitivity of the straightness error measurement is magnified by a factor of 4 compared with the lateral movement of the retro-reflector itself after the multi-reflections. A Renishaw ML10 laser interference measurement system was used to verify the developed system in a series of experiments in the laboratory environment. Experimental results agree with the expected results. The two-dimensional straightness error measurement had linear correlativity close to 1 and the standard one-to-one deviation error was better than 0.32 mu m obtained over a travel range of 600 mu m.
引用
收藏
页码:3795 / 3800
页数:6
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