Scanning Micro-Electrochemical Machining Process for V-Shaped Grooves

被引：3

作者：

Zhong, Hao ^{[1
,2
]}

Tong, Hao ^{[1
,2
]}

Wang, Zhiqiang ^{[1
]}

Li, Yong ^{[1
,2
]}

Pu, Yubin ^{[2
]}

机构：

[1] Tsinghua Univ, Dept Mech Engn, State Key Lab Tribol, Beijing 100084, Peoples R China

[2] Tsinghua Univ, Beijing Key Lab Precis Ultraprecis Mfg Equipments, Beijing 100084, Peoples R China

来源：

JOURNAL OF MICRO AND NANO-MANUFACTURING | 2020年 / 8卷 / 01期

基金：

中国国家自然科学基金;

关键词：

scanning micro-ECM; V-shaped grooves; process models; on-machine tool electrodes;

D O I：

10.1115/1.4046036

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Microstructures determine flow properties of microfluidic chip. Micromold forming is an effective method to realize mass manufacturing of microfluidic chips. This requires to machine some kind of special microstructure of high surface quality on a metal/alloy workpiece. Micro V-shaped grooves are the typical microstructures of the chip micromolds used for controlling microfluid or weld packaging. In this research, a scanning micro-electrochemical machining (ECM) process of V-shaped grooves is proposed using a tool electrode fabricated by micro-electrical discharge machining (EDM) on-machine. Theoretical and experimental research was conducted for achieving the V-shaped grooves with a given angle on die steel. A long-distance V-shaped groove with the given angle of 67 deg and the depth of 125 mu m was successfully machined.

引用

页数：6

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