Development of NbTiN-Al Direct Antenna Coupled Kinetic Inductance Detectors

被引：14
|
作者：
Lankwarden, Y. J. Y. [1 ]
Endo, A. [2 ]
Baselmans, J. J. A. [1 ]
Bruijn, M. P. [1 ]
机构：
[1] SRON Netherlands Inst Space Res, Sensor Res & Technol Div, NL-3584 CA Utrecht, Netherlands
[2] Delft Univ Technol, Kavli Inst NanoSci, Fac Sci Appl, NL-2628 CJ Delft, Netherlands
来源：
JOURNAL OF LOW TEMPERATURE PHYSICS | 2012年 / 167卷 / 3-4期
关键词：
Low temperature detectors; Kinetic inductance detectors; Process development; Air bridges;
D O I：
10.1007/s10909-012-0503-0
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
We have developed a coplanar waveguide (CPW) Kinetic Inductance Detector consisting of Al and NbTiN, coupled at its shorted end to a planar antenna. To suppress the odd mode due to direct coupling to sky radiation by the KID we have also developed freestanding metal air bridges.
引用
收藏
页码：367 / 372
页数：6
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